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Effects of Fabrication Parameters on Porous p+-Type Silicon Morphology

✍ Scribed by Salonen, J. ;Bj�rkqvist, M. ;Laine, E. ;Niinist�, L.


Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
87 KB
Volume
182
Category
Article
ISSN
0031-8965

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Effect of Photoetching on Porous Silicon
✍ Guerrero-Lemus, R.; Moreno, J. D.; Martín-Palma, R. J.; Martínez-Duart, J. M.; H 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 377 KB 👁 2 views

The morphological di †erences between porous silicon formed in the dark or under illumination have been studied by means of gravimetric measurements, transmission electron microscopy, infrared spectroscopy and cyclic voltammetry. Photoetching has been found to give rise to a complex surface structur