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Study of SiOx decomposition kinetics and formation of Si nanocrystals in an SiO2 matrix

✍ Scribed by B.J Hinds; F Wang; D.M Wolfe; C.L Hinkle; G Lucovsky

Book ID: 117148816
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 129 KB
Volume: 227-230
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(98)00094-5

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