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Study of refractive index profiles of ion-implanted silicon-on-insulator material

✍ Scribed by P.L. Swart; B.M. Lacquet

Book ID
113285776
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
428 KB
Volume
84
Category
Article
ISSN
0168-583X

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πŸ“œ SIMILAR VOLUMES

Refractive index profiles of planar opti
Refractive index profiles of planar optical waveguides in Ξ²-BBO produced by silicon ion implantation
✍ Xue-Lin Wang; Feng Chen; Fei Lu; Gang Fu; Shi-Ling Li; Ke-Ming Wang; Qing-Ming L πŸ“‚ Article πŸ“… 2004 πŸ› Elsevier Science 🌐 English βš– 281 KB

The planar waveguides have been fabricated in z-cut beta barium metaborate crystals by 2.8 MeV Si + ion implantation with doses of 1 β€’ 10 15 and 3 β€’ 10 15 ions/cm 2 at room temperature. The waveguides were characterized by the prism-coupling method. The refractive index profiles were reconstructed u