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Study of precipitate in Si-rich SiO2 films

✍ Scribed by R.S Brusa; W Deng; G.P Karwasz; A Zecca; G Mariotto; P Folegati; R Ferragut; A Dupasquier


Book ID
108417710
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
139 KB
Volume
194
Category
Article
ISSN
0169-4332

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