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Study of Polytype Switching vs. Micropipes in PVT Grown SiC Single Crystals

✍ Scribed by Wang, Shao Ping; Sanchez, Edward M.; Kopec, A.; Zhang, M.; Hernandez, O.

Book ID
121080793
Publisher
Trans Tech Publications, Ltd.
Year
2004
Tongue
English
Weight
247 KB
Volume
457-460
Category
Article
ISSN
1662-9752

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## Abstract Misoriented domains (MDs) are common defects in 6H‐SiC single crystals. We performed an experimental study on the formation of MDs in 2‐inch 6H‐SiC single crystals. Micro‐Raman spectroscopy revealed that the polytype of MDs was mainly 4H‐SiC. By changing growth conditions, it was found