Study of planarization of cobalt silicide lines and silicon surfaces by scanning force microscopy and scanning electron microscopy
β Scribed by K. Robrock; K. N. Tu; D. W. Abraham; J. B. Clabes
- Book ID
- 126509758
- Publisher
- American Institute of Physics
- Year
- 1989
- Tongue
- English
- Weight
- 562 KB
- Volume
- 54
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.101386
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