Study of PECVD Silicon Oxynitride Thin Layers as ISFET Sensitive Insulator Surface for pH Detection

✍ Scribed by Cros, Y.

• Book ID: 121876169
• Publisher: The Electrochemical Society
• Year: 1992
• Tongue: English
• Weight: 645 KB
• Volume: 139
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.2069246