Study of high-k Er2O3 thin layers as ISFET sensitive insulator surface for pH detection

✍ Scribed by Tung-Ming Pan; Jian-Chi Lin; Min-Hsien Wu; Chao-Sung Lai

• Book ID: 108265106
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 985 KB
• Volume: 138
• Category: Article
• ISSN: 0925-4005
• DOI: 10.1016/j.snb.2009.01.051