✦ LIBER ✦

Study of nitrous oxide plasma oxidation of silicon nitride thin films

✍ Scribed by M Bose; D.K Basa; D.N Bose

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

X-ray reflectivity studies of very thin

✍ S. Santucci; A.V. la Cecilia; A. DiGiacomo; R.A. Phani; L. Lozzi 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 115 KB

Properties of thin oxide-nitride-oxide s

✍ L. Do Thanh; Balk 📂 Article 📅 1988 🏛 Springer US 🌐 English ⚖ 412 KB

Low-temperature hydrolysis (oxidation) o

✍ Chiang, J. N.; Ghanayem, S. G.; Hess, D. W. 📂 Article 📅 1989 🏛 American Chemical Society 🌐 English ⚖ 607 KB

Plasma nitrided oxide films as a thin ga

✍ P. Debenest; K. Barla; A. Straboni; B. Vuillermoz 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 440 KB

Deposition of silicon oxide, nitride and

✍ Gerald Lucovsky; David V. Tsu 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 461 KB

The structure of silicon nitride films.

✍ Edelman, F. L. 📂 Article 📅 1979 🏛 John Wiley and Sons 🌐 English ⚖ 446 KB