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Study of metal barrier deposition-induced damage to porous low-k materials

✍ Scribed by Larry Zhao; Henny Volders; Mikhail Baklanov; Zsolt Tőkei; Marianna Pantouvaki; Christopher J. Wilson; Els Van Besien; Gerald P. Beyer; Cor Claeys

Book ID
113797831
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
368 KB
Volume
88
Category
Article
ISSN
0167-9317

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