𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Study of in situ laser deposited YBCO thin films

✍ Scribed by G. Brorsson; J.A. Alarco; Z.G. Ivanov; H. Olin; P-Å Nilsson; T. Claeson


Book ID
116017790
Publisher
Elsevier Science
Year
1990
Weight
616 KB
Volume
164-165
Category
Article
ISSN
0022-5088

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Narrow YBCO microbridges in ultrathin la
✍ M. Danerud; M.E. Gershenson; Z. Ivanov; D. Winkler; T. Claeson 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 283 KB

A new processing method for fabrication of narrow YBCO microbridges in ultrathin laser deposited films developed. A 600 A thick YBCO film on LaAIO3 was covered by 200 A of ZrO2. A lift-off stencil made by electron beam lithography was produced and covered by a 500 A thick ZrO2 etch mask. The mi~bri~