Narrow YBCO microbridges in ultrathin laser deposited films

✍ Scribed by M. Danerud; M.E. Gershenson; Z. Ivanov; D. Winkler; T. Claeson

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 283 KB
• Volume: 185-189
• Category: Article
• ISSN: 0921-4534
• DOI: 10.1016/0921-4534(91)91094-k

✦ Synopsis

A new processing method for fabrication of narrow YBCO microbridges in ultrathin laser deposited films developed. A 600 A thick YBCO film on LaAIO3 was covered by 200 A of ZrO2. A lift-off stencil made by electron beam lithography was produced and covered by a 500 A thick ZrO2 etch mask. The mi~bri~es (down to 0.4 l~m wide) were produced by ion milling. The 1 ~tm wide microbridge showed Tc a~e 90 K an Jc above 106 Ncm 2 at 77 K. This structure on a substrate with low dielectric loss is needed for ultrafast devices utilizing the electron heating effect.