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Study of growth kinetics and doping of semiconductor films by the method of computer simulation

✍ Scribed by Aleksandrov, L. N. ;Kogan, A. N. ;Dyakonova, V. I.


Publisher
John Wiley and Sons
Year
1980
Tongue
English
Weight
558 KB
Volume
61
Category
Article
ISSN
0031-8965

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