Control composition study of sputtered N
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Marc Bendahan; Pierre Canet; Jean-Luc Seguin; Hervé Carchano
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Article
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1995
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Elsevier Science
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English
⚖ 273 KB
Since the transition temperature of the shape memory effect in Ni,Ti 1 ,. films depends on the composition of the layer, it is indispensable to have an accurate control on their composition. We are now able to control in situ the composition of r.f. sputtered Ni Ti films in the whole domain of shape