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Study of Electronegative Ar/O2 Discharge by Means of Langmuir Probe

✍ Scribed by V. Straňák; J. Blažek; S. Wrehde; P. Adámek; Z. Hubička; M. Tichý; P. Špatenka; R. Hippler

Publisher
John Wiley and Sons
Year
2008
Tongue
English
Weight
309 KB
Volume
48
Category
Article
ISSN
0005-8025

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