✦ LIBER ✦
Langmuir Probe Characterization of a RF Discharge Excited in Ar/C2F3Cl Mixtures during Plasma Deposition Processes
✍ Scribed by P. Špatenka; M. Šícha
- Publisher
- John Wiley and Sons
- Year
- 1989
- Tongue
- English
- Weight
- 529 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0005-8025
No coin nor oath required. For personal study only.