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Study of electron tunnelling through thin polymer films using a mercury probe technique

✍ Scribed by Nabok, A.V.; Massey, J.; Buttle, S.; Ray, A.K.

Book ID
114448018
Publisher
The Institution of Electrical Engineers
Year
2004
Tongue
English
Weight
328 KB
Volume
151
Category
Article
ISSN
1350-2409

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Polymer thin films are widely used as coatings and interlevel dielectrics in microelectronic applications. In thin-film structures, stresses are generated due to interaction with adjacent layers and film shrinkage due to solvent evaporation or curing. This causes polymer chain orientation resulting