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Study of electrically active defects in n-GaN layer

✍ Scribed by C.B. Soh; D.Z. Chi; A. Ramam; H.F. Lim; S.J. Chua


Book ID
104420572
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
319 KB
Volume
4
Category
Article
ISSN
1369-8001

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✦ Synopsis


Deep level defects in both p + /n junctions and n-type Schottky GaN diodes are studied using the Fourier transform deep level transient spectroscopy. An electron trap level was detected in the range of energies at E c Γ€ E t ΒΌ 0:2320:27 eV with a capture cross-section of the order of 10 Γ€19 -10 Γ€16 cm 2 for both the p + /n and n-type Schottky GaN diodes. For one set of p + /n diodes with a structure of Au/Pt/p + -GaN/n-GaN/n + -GaN/Ti/Al/Pd/Au and the n-type Schottky diodes, two other common electron traps are found at energy positions, E c Γ€ E t ΒΌ 0:5320:56 eV and 0:7920:82 eV. In addition, an electron trap level with energy position at E c Γ€ E t ΒΌ 1:07 eV and a capture cross-section of s n ΒΌ 1:6 Γ‚ 10 Γ€13 cm 2 are detected for the n-type Schottky diodes. This trap level has not been previously reported in the literature. For the other set of p + /n diodes with a structure of Au/Ni/p + -GaN/n-GaN/n + -GaN/Ti/Al/Pd/Au, a prominent minority carrier (hole) trap level was also identified with an energy position at E t Γ€ E v ΒΌ 0:85 eV and a capture cross-section of s n ΒΌ 8:1 Γ‚ 10 Γ€14 cm 2 . The 0.56 eV electron trap level observed in n-type Schottky diode and the 0.23 eV electron trap level detected in the p + /n diode with Ni/Au contact are attributed to the extended defects based on the observation of logarithmic capture kinetics.


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