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Study of Carrier Mobility of Low-Energy High-Dose Ion Implantations

✍ Scribed by Qin, Shu; Prussin, Simon A.; Reyes, Jason; Hu, Yongjun Jeff; McTeer, Allen

Book ID: 118066332
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 744 KB
Volume: 39
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2010.2089702

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