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Study of AlN dielectric film on graphene by Raman microscopy

โœ Scribed by Jin, Zhi; Su, Yongbo; Chen, Jianwu; Liu, Xinyu; Wu, Dexin

Book ID
121467104
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
384 KB
Volume
95
Category
Article
ISSN
0003-6951

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Applications insulated metal substrates (IMS) for high-density and high-power mounting are greatly extending with miniaturizing of electronic components. Recently, aluminum nitride film has been used as a potential insulator and/or passivation material in insulated metal substrate because of its hig