Study of 1.5 keV Ar atoms beam induced ripple formation on Si surface by atomic force microscopy

✍ Scribed by P.K. Kulriya; A. Tripathi; D. Kabiraj; S.A. Khan; D.K. Avasthi

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 309 KB
• Volume: 244
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.11.075