Studies on the synthesis of hard coatings by plasma-assisted CVD using metallo-organic compounds

✍ Scribed by K.-T. Rie; A. Gebauer; J. Wöhle

• Book ID: 107930506
• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 398 KB
• Volume: 74-75
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(95)08215-8