Studies on the lattice match and strain in the epitaxial growth of III – V alloys on inas and GaSb substrates

Epitaxial Deposition of GaAs in the Ga(C

Epitaxial Deposition of GaAs in the Ga(CH3)3AsH3H2 System (III) Heteroepitaxy on Isolating Substrates

✍ Dr. W.-H. Petzke; Dr. V. Gottschalch; Prof. Dr. sc. E. Butter 📂 Article 📅 1974 🏛 John Wiley and Sons 🌐 English ⚖ 416 KB 👁 2 views

## Abstract Epitaxial growth of GaAs has been achieved on CaF~2~, α‐Al~2~O~3~ and spinel substrates. X‐ray investigations showed well defined relations between layer perfection and the quality of substrate material. The formation of epitaxial layers in pyrolytic deposition processes is discussed in