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Studies of the sputter deposition of carbon, silicon and SiC films

✍ Scribed by A. Sathyamoorthy; W. Weisweiler

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 530 KB
Volume: 87
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(82)90568-5

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