Sputter-Auger and Auger line shape analyses of SiC films produced by simultaneous sputter deposition of silicon and carbon

✍ Scribed by P. Morgen; T.W. Barbee Jr.; K. Seaward

• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 52 KB
• Volume: 90
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(82)90391-1