✦ LIBER ✦

Studies of the reaction mechanisms for the chemical vapour deposition of tungsten from tungsten hexafluoride in a plasma environment

✍ Scribed by J Wood

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Preparation of low resistivity tungsten

✍ A. Belkacem; Y. Arnal; J. Pelletier; E. André; J.C. Oberlin 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 311 KB

Synthesis of cubic BN from the gas phase

✍ Yukio Ichinose; Hidetoshi Saitoh; Yoshihiko Hirotsu 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 666 KB

Chemical vapour deposition of tungsten i

✍ Ulf Jansson; Jan-Otto Carlsson 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 591 KB

An immitance study of the mechanism of h

✍ P. Zoltowski 📂 Article 📅 1989 🏛 Elsevier Science ⚖ 916 KB

Chemical vapour deposition: a matrix iso

✍ Matthew J. Almond; Carolyn E. Jenkins; David A. Rice; Carol A. Yates 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 894 KB