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Studies of the photoconductivity of gadolinium oxide films

✍ Scribed by Graż;yna B. Nowak

Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
215 KB
Volume
78
Category
Article
ISSN
0040-6090

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Atomic Layer Deposition of Gadolinium Ox
Atomic Layer Deposition of Gadolinium Oxide Films
✍ K. Kukli; T. Hatanpää; M. Ritala; M. Leskelä 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 320 KB 👁 1 views

Thin cubic Gd 2 O 3 films are grown by atomic layer deposition (ALD), in the temperature range 300-400 °C, using a novel tris(2,3-dimethyl-2-butoxy)gadolinium(III) precursor, Gd[OC(CH 3 ) 2 CH(CH 3 ) 2 ] 3 , and water. The films are crystalline in their as-deposited state. The films contain some res