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Studies of the chemical kinetics on the vapor phase axial deposition method

โœ Scribed by K. Sanada; T. Shiota; K. Inada

Book ID
115990411
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
887 KB
Volume
188
Category
Article
ISSN
0022-3093

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โœ Carol M. McConica; David A. Bell; Kevin L. Baker; Devin Moss ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› American Institute of Chemical Engineers ๐ŸŒ English โš– 713 KB

A lab-scale nonflowing reactor was built to study chemical vapor deposition reactions. Mass spectrometry is used to follow reaction pathways and to determine instantaneous reaction rates throughout film growth. In each experiment, the kinetic rate dependence on concentration for a wide range of conc