𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Studies of stress related issues in microwave CVD diamond on 〈100〉 silicon substrates

✍ Scribed by Joseph A. Baglio; Barry C. Farnsworth; Sandra Hankin; Greg Hamill; David O'Neil

Book ID
103430934
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
420 KB
Volume
212
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Dependence of CVD diamond growth rate on
Dependence of CVD diamond growth rate on substrate orientation as a function of process parameters in the high microwave power density regime
✍ Brinza, O. ;Achard, J. ;Silva, F. ;Bonnin, X. ;Barroy, P. ;Corte, K. De ;Gicquel 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 469 KB

## Abstract The use of diamond as a material for high power electronics requires high‐purity monocrystalline thick diamond films. Hence it is extremely important to have perfect control of the morphology during the entire growth process, so that the useable surface be maximized and residual stresse