Studies of Novel Copolymers for Deep-UV Photoresists. I. Synthesis and Properties of Poly(Styrene-co-Silicon-containing maleimide)

✍ Scribed by Shu, Wei-Jye

• Book ID: 119987580
• Publisher: Nature Publishing Group
• Year: 2006
• Tongue: English
• Weight: 188 KB
• Volume: 38
• Category: Article
• ISSN: 0032-3896
• DOI: 10.1295/polymj.pj2005186