✦ LIBER ✦
Studies of novel copolymers for deep-UV photoresists. I. Synthesis and properties of poly(styrene-co-silicon-containing maleimide)
✍ Scribed by Wei-Jye Shu
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 111 KB
- Volume
- 102
- Category
- Article
- ISSN
- 0021-8995
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