Studies of GaAs surface roughness and organic masks resistance depending on the ion-beam energy

✍ Scribed by B. Walkow; H. W. Loeb; J. Freisinger; C. Mößner

• Book ID: 112290755
• Publisher: Springer
• Year: 1991
• Tongue: English
• Weight: 830 KB
• Volume: 341
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/bf00321557