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Studies of a sheath structure in an RF discharge using experimental, analytical, and simulation approaches

✍ Scribed by Kim, J.-B.; Kawamura, K.; Choi, Y.-W.; Bowden, M.D.; Muraoka, K.

Book ID: 114558855
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 139 KB
Volume: 27
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.799833

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