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Structuring of sputtered superelastic NiTi thin films by photolithography and etching

✍ Scribed by Christiane Zamponi; Holger Rumpf; Clemens Schmutz; Eckhard Quandt

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 371 KB
Volume: 481-482
Category: Article
ISSN: 0921-5093
DOI: 10.1016/j.msea.2006.10.216

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