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Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications

✍ Scribed by Otterbach, R.; Hilleringmann, U.; Horstmann, T.J.; Goser, K.

Book ID: 121930067
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 278 KB
Volume: 10
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(01)00373-9

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[IEEE 2000 IEEE International Conference on Industrial Electronics, Control and Instrumentation - Nagoya, Japan (22-28 Oct. 2000)] 2000 26th Annual Conference of the IEEE Industrial Electronics Society. IECON 2000. 2000 IEEE International Conference on Industrial Electronics, Control and Instrumentation. 21st Century Technologies and Industrial Opportunities (Cat. No.00CH37141) - Reactive ion etching of CVD-diamond for sensor devices with a minimum feature size of 100 nm

✍ Otterbach, R.; Hilleringmann, U.; Goser, K. 📂 Article 📅 2000 🏛 IEEE ⚖ 867 KB