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[IEEE 2000 IEEE International Conference on Industrial Electronics, Control and Instrumentation - Nagoya, Japan (22-28 Oct. 2000)] 2000 26th Annual Conference of the IEEE Industrial Electronics Society. IECON 2000. 2000 IEEE International Conference on Industrial Electronics, Control and Instrumentation. 21st Century Technologies and Industrial Opportunities (Cat. No.00CH37141) - Reactive ion etching of CVD-diamond for sensor devices with a minimum feature size of 100 nm

✍ Scribed by Otterbach, R.; Hilleringmann, U.; Goser, K.

Book ID: 115464075
Publisher: IEEE
Year: 2000
Weight: 867 KB
Edition: 2000
Volume: 3
Category: Article
ISBN-13: 9780780364561
DOI: 10.1109/iecon.2000.972561

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