Structure quality in deep X-ray lithography applying commercial polyimide-based masks

✍ Scribed by Sven Achenbach; Martin Boerner; Seichin Kinuta; Walter Bacher; Juergen Mohr; Volker Saile; Yasunori Saotome

• Book ID: 106185127
• Publisher: Springer-Verlag
• Year: 2006
• Tongue: English
• Weight: 381 KB
• Volume: 13
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-006-0223-y