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Structure of the bubble layer in an asphalt oxidation tower

✍ Scribed by I. B. Grudnikov; Yu. I. Grudnikova

Book ID
106383518
Publisher
Springer US
Year
2006
Tongue
English
Weight
60 KB
Volume
42
Category
Article
ISSN
0009-3092

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Properties of the buried oxide layer in
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✍ A.G. Revesz; H.L. Hughes πŸ“‚ Article πŸ“… 1997 πŸ› Elsevier Science 🌐 English βš– 605 KB

After a short summary of the status of the buried 6x~qCle layer in SIMOX structures as of 1994, this pal~er reviews the developments since then. The main fOf~iCS are as follows: effects of processing condltiOttS, such aS low oxygen dose implantation, add;lionel oxidation; holetrappng behavior and co