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Structure of epitaxial δ-NbN films deposited by cathode reactive sputtering

✍ Scribed by E.V. Shalaeva; R.S. Baryshev; M.V. Kuznetsov; B.V. Mitrofanov

Book ID: 108388867
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 662 KB
Volume: 261
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(94)06508-x

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