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Structure of Annealed Polycrystalline Silicon Films. I. Recrystallization

✍ Scribed by Edelman, F. L. ;Heydenreich, J. ;Hoehl, D. ;Matthäi, J. ;Melnik, I. ;Rzhanov, A. ;Voelskov, M. ;Werner, P.


Publisher
John Wiley and Sons
Year
1986
Tongue
English
Weight
597 KB
Volume
98
Category
Article
ISSN
0031-8965

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