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Structure, impurity composition, and photoluminescence of mechanically polished layers of single-crystal silicon

✍ Scribed by R. I. Batalov; R. M. Bayazitov; N. M. Khusnullin; E. I. Terukov; V. Kh. Kudoyarova; G. N. Mosina; B. A. Andreev; D. I. Kryzhkov

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