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Structure characterization of AlN buffer layers grown on (0 0 0 1) sapphire by magnetron sputter epitaxy

✍ Scribed by H Tang; J.B Webb; S Moisa; J.A Bardwell; S Rolfe

Book ID: 108341699
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 191 KB
Volume: 244
Category: Article
ISSN: 0022-0248
DOI: 10.1016/s0022-0248(02)01602-0

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Structure characterization of AlN buffer layers grown on (0&#xa0;0&#xa0;0&#xa0;1) sapphire by magnetron sputter epitaxy

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