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Structure and Properties of Ti-O-N Films Synthesized by Reactive Magnetic Sputtering

✍ Scribed by Y.X. Leng; Z.H. Wang; N. Huang


Book ID
113846521
Publisher
Elsevier
Year
2011
Tongue
English
Weight
249 KB
Volume
18
Category
Article
ISSN
1875-3892

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