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Structure and properties of CaNb2O6:Sm3+thin films by pulsed laser deposition

✍ Scribed by Wang, Yinzhen; Zhang, Liaolin; Cao, Renping; Miao, Qing; Qiu, Jianrong

Book ID
121601550
Publisher
Springer
Year
2013
Tongue
English
Weight
758 KB
Volume
115
Category
Article
ISSN
1432-0630

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Zr-Al-O dielectric films have been deposited on Pt-coated silicon substrates and directly on n-type Si substrates, respectively, by pulsed laser deposition technique using a (ZrO ) (Al O ) ceramic target. The 2 0.5 2 3 0.5 Zr-Al-O films deposited in 20 Pa oxygen ambient at 300 8C substrate temperat