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Structure and properties of c-BN film deposited by activated reactive evaporation with a gas activation nozzle

โœ Scribed by K. Inagawa; K. Watanabe; K. Saitoh; Y. Yuchi; A. Itoh


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
667 KB
Volume
39-40
Category
Article
ISSN
0257-8972

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