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Structure and properties of Bi2Sr2CaCu2Ox/Bi2Sr2CuOx superlattices prepared by RF magnetron sputtering

โœ Scribed by Masumi Inoue; Kenji Yoshida; Kazushige Ohbayashi; Yoshiaki Takai; Hisao Hayakawa


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
414 KB
Volume
200
Category
Article
ISSN
0921-4534

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As grown Bi2Sr2CaCu2Oy films by an off a
โœ J.H. Lu; H.C. Yang; H.E. Horng ๐Ÿ“‚ Article ๐Ÿ“… 1994 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 148 KB

Bi2Sr2CaCu2Oy (BSCCO) films were in intu grown by an off axis rf magnetron sputtering. The sputtering targets were stoichiometric Bi2Sr2CaCu2Oy compounds. The sputtering gas was a mixture of 0 2 and Ar and the sputtering pressure varied from 50 -100 mTorr. The films were grown at 570 -600 ยฐC. After