As grown Bi2Sr2CaCu2Oy films by an off axis RF magnetron

✍ Scribed by J.H. Lu; H.C. Yang; H.E. Horng

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 148 KB
• Volume: 194-196
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/0921-4526(94)91667-5

✦ Synopsis

Bi2Sr2CaCu2Oy (BSCCO) films were in intu grown by an off axis rf magnetron sputtering. The sputtering targets were stoichiometric Bi2Sr2CaCu2Oy compounds. The sputtering gas was a mixture of 0 2 and Ar and the sputtering pressure varied from 50 -100 mTorr. The films were grown at 570 -600 °C. After growth the films were quickly cooled down to 300 K in 30 minutes. One found that the distance from the substrate to the target d is an important factor in affecting the deposition rate of the as grown BSCCO films• By reducing the distance d to 3 cm, we have achieved a deposition rate of about 1500A per hour in a sputtering power of 60 watts and sputtering pressure of 70 mtorr. With optimum growth conditions where the substrate temperature was kept at 580 -600 °C and the pressure was kept at 70 -80 mTorr, superconducting BSCCO films with zero resistance at 75 -85 K can be reproduced.