Growth and microstructure of MgO thin fi
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F Niu; B.H Hoerman; B.W Wessels
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Article
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2000
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Elsevier Science
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English
β 247 KB
MgO thin films have been grown on Si 100 substrates at low temperatures of 500-8508C by metal-organic molecular Ε½ . beam epitaxy MOMBE using the solid precursor magnesium acetylacetonate. Oxygen plasma is required to achieve Ε½ . deposition. The composition of the films was determined by Auger electr