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Structure and crystallographic orientation of aluminum films onn-andp-silicon in the Al-Ti-Si and Al-Ti-SiOx-Si systems

✍ Scribed by L. I. Gurskii; Yu. P. Snitkovskii


Book ID
106472781
Publisher
Springer US
Year
2007
Tongue
English
Weight
147 KB
Volume
49
Category
Article
ISSN
0026-0673

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