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Structure analysis of teflon-like thin films synthesized by ion beam sputtering deposition

✍ Scribed by Liduo Wang; Haibo Li; Jianli He; Xiaoming He; Wenzhi Li; Yinghua Wang; Hengde Li

Book ID: 117358281
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 143 KB
Volume: 33
Category: Article
ISSN: 0167-577X
DOI: 10.1016/s0167-577x(97)00074-8

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